The SPR Series Subatmospheric Pressure Regulator is designed for the introduction of a low vapor pressure reactive or purge gas into a subatmospheric process. The large diameter diaphragm provides optimum sensitivity for subatmospheric or positive pressure control.

Standard features allow service in many varied applications including corrosive fluids and, with the optional features available, the user can tailor this regulator to applications ranging from semiconductor processing to analytical instrumentation.